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CVD-SiC Coating

General Outline

We offer semi-conductor manufacturing parts having ultrahigh purity and high corrosion resistance.

Free standing CVD-SiC boat&holder
Free standing CVD-SiC boat&holder

CVD SiC coating on sintered SiC and high purity carbon substrates mainly for
semi-conductor uses Example : process tube, Liner tube, wafer boat
Free standing CVD-SiC products
Example : SiC wafer, free standing CVD-SiC boat, free standing CVD-SiC holder

Main Features & Delivery Records

Main Features
  • Ultra high purity of ppb level
  • High corrosion resistance
  • Thick SiC film depositiopn ( ~ a few mm)
For details
ADMAP INC. HOME PAGE
http://www.mes.co.jp/admap/

Please contact:

ADMAP INC. Sales Dept.

Tel.
+81-3-3544-3640
Fax.
+81-3-3544-3055
URL:
http://www.mes.co.jp/admap (URL)